On the Mechanics and Physics in the Nano-Indentation of Silicon Monocrystals
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概要
- 論文の詳細を見る
This paper aims to investigate some fundamental problems of mechanics and physics in the nano-indentation of silicon monocrystals with the aid of molecular dynamics analysis. The study showed that inelastic deformation of silicon monocrystals is solely caused by amorphous phase transformation. Dislocations do not appear and purely elastic deformation exists only in an extremely narrow regime. The onset of inelastic deformation can be predicted by a criterion considering either the octahedral or maximum shear stress. Due to phase transformation, the conatct area between indenter and specimen varies in a very complex manner. The study offers a new theory for the nano-indentation of monocrystalline silicon.
- 一般社団法人日本機械学会の論文
- 1999-10-15
著者
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Tanaka Hiroaki
Department of Cardiovascular Medicine, Tottori University Faculty of Medicine
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Tanaka Hiroaki
Department Of Cardiovascular Medicine Tottori University Fuculty Of Medicine
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Zhang Liang-chi
Department Of Mechanical And Mechatronic Engineering The University Of Sydney
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Tanaka Hiroaki
Department Of Mechanical And Mechatronic Engineering The University Of Sydney
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Tanaka Hiroaki
Department Of Biology Aichi University Of Education
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