流体素子を応用したマイクロバルブ(S20-3 マイクロチャンネル要素,S20 マイクロ・ナノスケールの流動現象)

概要

論文の詳細を見る
Characteristics of a fluidics device of 1×1 mm flow area was examined using water as test fluid. The fluidics device had a simple geometry of y shape with two signal ports. Although Reynolds number tested was low; about 1000, the device functioned as the fluidics device; flow provided for a signal port flowed out from an opposite outlet. A fluidics device where the signal ports were replaced with dead-end boxes which had a piezo elements on the wall. It was expected that the piezo elements created a micro jet with no net flow rate. As the frequency of the piezo element actuation was increased, a delivery flow rate from the opposing outlet increased and a delivery flow rate from the other outlet decreased by that amount. It was confirmed that the micro/mini flow device with the piezo element would have a possibility to work as the flow control device.
2004-09-04