Effect of RF Power and Substrate Temperature on Physical Properties of Zr_<0.8>Sn_<0.2>TiO_4 Films by RF Magnetron Sputtering : Electrical Properties of Condensed Matter
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-12-15
著者
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Huang Cheng-liang
Department Of Electrical Engineering National Cheng Kung University
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Hsu Cheng-shing
Department Of Electrical Engineering National Cheng Kung University
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Huang Cheng-liang
Department Of Electrical Enggineering National Cheng-kung University
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