Analysis of characteristics of PHEMT's fabricated by gate recess methods
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概要
- 論文の詳細を見る
In this study, the characteristics of the fabricated PHEMT's by various gate recess methods were compared. PHEMT's were fabricated by using the wide single recess, narrow single recess, and double recess methods. From the measured results of the fabricated PHEMT's, the narrow single recessed PHEMT's show the best DC characteristics among them with transconductance of 522.4ms/mm among them, but RF characteristics of double recessed PHEMT are superior to those of the other PHEMT's i. e. f_γ of 120 GHz and f_<max> of 210 GHz, respectively. For detailed analysis of the double recessed PHEMT's, we have fabricated PHEMT's with various wide recess depth and measured DC and RF characteristics. From the measured results, we obtained that RF characteristics increased until etch depth of 60 % of cap layer and then decreased. When wide recess depth is 60 % of cap layer, we obtained gm of 457.3 mS/mm, breakdown voltage of 11 V, f_γ of 124 GHz, f_<max> of 220 GHz and S_<21> gain of 5.4 dB at 50GHz, respectively.
- 社団法人電子情報通信学会の論文
- 2002-06-25
著者
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Park H.m.
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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Lee Seong
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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Rhee J
Dongguk Univ. Seoul Kor
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Rhee Jin
Millimeter-wave Innovation Technology Research Center (mint) Dongguk University
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Lee S.d.
Millimeter-wave Innovation Technology Research Center Dongguk University
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Park Hyun
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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Kim Sam
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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Park Hyung
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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An Dan
Millimeter-wave INnovation Technology research center (MINT), Dongguk University
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An D
Millimeter-wave Inovation Technology Research Center (mint) Dongguk Univerisity
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An Dan
Millimeter-wave Innovation Technology Research Center(mint) Dongguk University
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An Dan
Millimeter-wave Innovation Technology Research Center (mint) Dongguk University
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