A Complementary Metal Oxide Semiconductor (CMOS) Compatible Capacitive Silicon Accelerometer with Polysilicon Rib-Style Flexures
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Yee Youngjoo
School Of Electrical Engineering And Inter-university Semiconductor Research Center (isrc) Seoul Nat
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KIM Seokyu
Kong-Hwa Ltd
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KIM Hyeoncheol
School of Electrical Engineering and Inter-university Semiconductor Research Center (ISRC), Seoul Na
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CHUN Kukjin
School of Electrical Engineering and Inter-university Semiconductor Research Center (ISRC), Seoul Na
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HONG Ikpyo
Kong-Hwa Ltd
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LEE Jongwon
Institute for Advanced Engineering (IAE)
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Chun Kukjin
School Of Electrical Engineering And Computer Science #038 And Inter-university Semiconductor Resear
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Chun Kukjin
School Of Electrical Engineering And Inter-university Semiconductor Research Center (isrc) Seoul Nat
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Kim Hyeoncheol
School Of Electrical Engineering And Inter-university Semiconductor Research Center (isrc) Seoul Nat
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