Low Temperature Epitaxial Growth of Highly-Conductive ZnSe Layers in Mixed Plasma of Hydrogen and Hydrogen Chloride
スポンサーリンク
概要
- 論文の詳細を見る
Highly conductive ZnSe layers with resistivitv of 10^<-3> Ω・cm (electron density: 2.8×10^<19> cm^<-3>, Hall mobility: 140 cm^2/Vs) have been grown on (100)GaAs by plasma-assisted epitaxy at 318℃ in a mixed plasma of hydrogen and HCl. However, photoluminescent measurements suggest that excessive doping above 10^<19> cm^<-3> reduce the conductivity from its maximum value by inducing complex defects.
- 社団法人応用物理学会の論文
- 1987-06-20
著者
-
YAMAUCHI Satoshi
Department of Internal Medicine (II) , KANSAI MEDICAL UNIVERSITY
-
Matsushita Koichi
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
-
Matsushita Koichi
Department Of Electronic Engineering Tohoku University
-
Hariu Takashi
Department Of Electrical Engineering Tohoku University
-
Yamauchi Satoshi
Department Of Electronic Engineering Tohoku University
-
Yamauchi Satoshi
Department Of Agricultural Chemistry Faculty Of Agriculture Kyushu University
関連論文
- Hydrogen Gas Sensing Using a Pd-Coated Cantilever
- Improved Response Time of Al-Al_2O_3-Pd Tunnel Diode Hydrogen Gas Sensor
- Pd/Ni-Al_2O_3-Al Tunnel Diode as High-Concentration-Hydrogen Gas Sensor
- Current vs Voltage Characteristics of Al-Al_2O_3-Pd Tunnel Junction Hydrogen Sensor
- Analysis of Negative Resistance Based on Space-Charge-Layers Overlapping in Switching Diodes with Deep Impurity Levels
- Delayed Switching in Crystalline Si Diodes with Deep Impurity Levels
- Heavily Te-Doped GaAs Layers by Plasma-Assisted Epitaxy
- Low Temperature Thermal Nitridation of GaAs Surfaces
- Schottky Contact Characterization of Sputter-Etched Surface of GaAs and Its Recovery by Annealing
- Gallium Oxide Film by Anodic Oxidization of Gallium
- Gallium Oxide Thin Film by Reactive Vapour Deposition
- Bulk Limited Conduction in Metal-Insulator-Metal Systems
- CIRCULATORY EFFECT OF OP-1206, AN ORAL PROSTAGLANDIN E_1 DERIVATIVE : Cardiovascular drugs (II) : FREE COMMUNICATIONS (Abstract) : 45 Annual Scientific Meeting, Japanese Circulation Society
- Promotion of High-T_c Phase in Te-Doped (Bi, Pb)_2Sr_2Ca_2Cu_3O_y Superconductors Prepared by the Melt-Quenching Method
- On the Formation of High-T_c Phase in Mo-Doped (Bi, Pb)_2Sr_2Ca_2Cu_3O_y Superconductors
- Effect of Low-Temperature Annealing on the Coupling at Grain Boundaries in Sb-Doped (Bi, Pb)_2Sr_2Ca_2Cu_3O_y Superconductors
- Effect of Sb Addition on the Formation of High-T_c Phase in the Bi-Pb-Sr-Ca-Cu-O Ceramics
- P-n Junction Capacitance Thermometers
- Generalized Expression for Small Signal Impedance of Solid State Single Injection Diodes Including Space Charge Effects
- Plasma-Assisted Deposition of GaAs Thin Films : III-3: III-V COMPOUND SOLAR CELLS
- Generalized Small Signal Admittances of Solid State Diodes
- Transient Response Simulation of Semiconductor Diodes with Deep Impurity Levels
- Synthesis of Methyl (S)-(-)-6,8-Dihydroxyoctanoate as a Precursor of (R)-(+)-α-Lipoic Acid
- Reduction of Alkyl (2-Oxocyclohexyl)acetates by Baker's Yeast
- Hydrofluoric-Treated GaAs Surfaces Analyzed by Contact Angle Measurement and Auger Electron Spectroscopy
- Observation of HCl- and HF-Treated GaAs Surfaces by Measuring Contact Angles of Water Droplets
- Plasma-Assisted Epitaxial Growth of P-Type ZnSe in Nitrogen-Based Plasma
- Superconducting Properties of Bi-Pb-Sr-Ca-Cu-O Ceramics Prepared by the Melt-Quenching Method
- Preparation of High-T_c Superconducting Bi-Pb-Sr-Ca-Cu-O Ceramics by the Melt Quenching Method : Electrical Properties of Condensed Matter
- Effect of Mg Addition on Superconducting Properties of Ba-Y-Cu-O Ceramics Prepared by the Melt Quenching Method : Electrical Properties of Condensed Matter
- Effects of Annealing Conditions on Superconducting Properties of BiCaSrCu_2O_x Ceramics Prepared by the Melt Quenching Method : Electrical Properties of Condensed Matter
- On the New Substrate Materials for High-T_c Superconducting Ba-Y-Cu-O Thin Films : Electrical Properties of Condensed Matter
- On the Reactions of Quenched BaYCuO Powders with Various Materials : Electrical Properties of Condensed Matter
- High-T_c Superconducting Glass Ceramics Based on the Bi-Ca-Sr-Cu-O System : Electrical Properties of Condensed Matter
- Preparation of High-T_c Superconducting Bi-Ca-Sr-Cu-O Ceramics by the Melt Quenching Method : Electrical Properties of Condensed Matter
- Crystalline Phases in Superconductor Ba-Y-Cu-O with High T_c Prepared by Melting Method
- Liquid Quenched Superconductor Ba-Y-Cu-O with T_=88 K and AC Josephson Effect at 77 K
- Electrochemical Intercalation of Organic Molecules into Thin Film of Layered Oxide MoO_3
- Effect on Insecticidal Activity of Substituents at the 1,4-Benzodioxanyl Moiety of Haedoxan
- Syntheses of 2-Substituted 6/7-Methoxy-1,4-benzodioxan-7/6-carbaldehydes
- Chromano-analogs of Insecticidal Neolignans of the 1,4-Benzodioxane Type
- Insecticidal Activity of Sesquilignans with a 3-Aryl-6-methoxy-2-methoxymethyl-1,4-benzodioxanyl Group
- Low Temperature Epitaxial Growth of Highly-Conductive ZnSe Layers in Mixed Plasma of Hydrogen and Hydrogen Chloride
- Influence on Insecticidal Activity of the 3-(3,4-Methylenedioxyphenyl) Group in the 1,4-Benzodioxanyl Moiety of Haedoxan
- Synthesis and Insecticidal Activity of Lignan Analogs (II)
- Synthesis and Insecticidal Activity of Sesquilignan Analogs with 2-Alkyl-6-methoxy-3-(3,4-methylenedioxyphenyl)-1,4-benzodioxanyl Group
- Synthesis and Insecticidal Activity of Lignan Analogs (III)
- Low-Temperature Surface Cleaning of Si and Successive Plasma-Assisted Epitaxial Growth of GaAs
- The Effect of Hydrogen Plasma on the Low Temperature Epitaxial Growth of InSb
- A Novel Buffer Layer using Titanium-Oxide for ZnO epitaxial growth on Sapphire
- Passive-Fixation Lead Implantation into Interventricular Septum. An Easy and Safety Method
- Diffusion Effect on Negative Resistance in Semiconductor Diodes with Deep Impurity Levels