Application of Image Reconstruction Technique for the Measurement of Two-Dimensional Ion Energy Distributions Using a Retarding-Field Energy Analyzer
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概要
- 論文の詳細を見る
A new measurement method of two-dimensional ton energy distribution impinging on a grounded electrode is developed for the conventional retarding-field energy analyzer, by means of the application of an image reconstruction technique. Electrically isolated multiple collectors are used for ion current measurement in the retarding-field energy analyzer. Two-dimensional ion energy distribution is reconstructed from the ion current by the algebraic reconstruction technique. As an example, the two-dimensional ton energy distribution in the capacitively coupled rf glow discharge at 13.56 MHz and 0.05 Torr in Ar is shown.
- 社団法人応用物理学会の論文
- 1996-09-15
著者
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WATANABE Tsuneo
Department of Applied Electronics, Faculty of Industrial Science and Technology, Tokyo University of
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Tochikubo Fumiyoshi
Department Of Electrical Engineering Tokyo Metropolitan University
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Tochikubo Fumiyoshi
Departmen Of Electrical Engineering Tokyo Metropolitan University
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Tochikubo Fumiyoshi
Department Of Electrical Engineering Faculty Of Engineering Tokyo Metropolitan University
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SUEMASA Kenkoh
Department of Electrical Engineering, Faculty of Engineering, Tokyo Metropolitan University
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Suemasa Kenkoh
Department Of Electrical Engineering Faculty Of Engineering Tokyo Metropolitan University
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Watanabe T
Tokai Univ.
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Watanabe Tsuneo
Department Of Applied Electronics Faculty Of Industrial Science And Technology Science University Of
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Watanabe Tsuneo
Departmen of Electrical Engineering, Tokyo Metropolitan University
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