Numerical Simulation of High-Frequency Driven Dielectric Barrier Microdischarge with Coplanar Electrode Configuration in Ar
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概要
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Two-dimensional numerical simulation based on the fluid model was carried out to investigate the fundamental property of high-frequency driven dielectric barrier microdischarge (DBMD) with a coplanar electrode configuration. For the simulation conditions, the gas is Ar at 100 Torr and the driving frequency of the applied voltage is 10 MHz. A gradual increase in electron density due to repeated electron avalanche in the rf electric field causes the gaseous breakdown of DBMD. The microdischarge structure such as the cathode sheath and arcuate bulk plasma is established after exceeding the electron density of $10^{13}$ cm-3. The DBMD in the periodic steady-state is maintained by electron-impact ionization at the plasma-sheath boundary in front of the instantaneous cathode. The effects of gap length and electrode width on the DBMD characteristics are investigated. Gap length controls the gaseous breakdown voltage and electrode width controls discharge power and plasma density. We also showed that a high-frequency driven microplasma array provided a relatively uniform distribution of excited species.
- 2006-10-15
著者
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Otsuka Shin
Department Of Surgery Jichi Medical School
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Tochikubo Fumiyoshi
Departmen Of Electrical Engineering Tokyo Metropolitan University
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UCHIDA Satoshi
Department of Chemistry and Materials Engineering, Faculty of Chemistry, Materials and Bioengineering, Kansai University
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Otsuka Shin
Department of Electrical Engineering, Tokyo Metropolitan University, 1-1 Minami-Osawa, Hachioji, Tokyo 192-0397, Japan
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