Atomic Force Microscopy and Infrared Spectroscopy Studies of Hydrogen Baked Si Surfaces

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Atomic Force Microscopy and Infrared Spectroscopy Studies of Hydrogen Baked Si Surfaces
High Resolution Structure Imaging of Octahedral Void Defects in As-Grown Czochralski Silicon
H_2O_2 Decomposition and Its Impact on Silicon Surface Roughening and Gate Oxide Integrity
Charge Trapping in SiO_x/ZrO_2 and SiO_x/TiO_2 Gate Dielectric Stacks
Critical Parameters for Obtaining Low Particle Densities on a Si Surface in an HF-Last Process
Gate Voltage Dependence of Reliability for Ultra-Thin Oxides
Reliability of Ultra-Thin Gate Oxide Below 3 nm in the Direct Tunneling Regime
Reliability of Ultra-Thin Gate Oxides Below 3nm in the Direct Tunneling Regime
Roughness Assessment of Polysilicon Using Power Spectral Density
AlGaN/GaN/AlGaN Double Heterostructures Grown on 200mm Silicon (111) Substrates with High Electron Mobility

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