Preparation of Ca-Substituted Y-Ba-Cu-O "124" Phase Thin Films by Magnetron Sputtering and Their Thermal Stability
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概要
- 論文の詳細を見る
Calcium-substituted Y-Ba-Cu-O "124" nearly single-phase thin films were prepared by sputtering at 550℃ and anealing in oxygen at 750℃ for 50 hours. T_c(on) and T_c(zero) values were 87 K and 65 K, respectively. At higher deposition temperatures, the as-grown "123" phase was not completely transformed into the "124" phase. The Ca-substituted "124" phase thin films were stable, and T_c(on) did not change below 600℃, even in pure nitrogen. However, at over 600℃, in nitrogen the films changed to the "123" phase and oxygen defects in the resultant "123" phase increased, and the T_c value dropped.
- 社団法人応用物理学会の論文
- 1991-05-01
著者
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MIURA Tatsuro
Department of Applied Physics, Graduate School of Engineering, Tohoku University
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Terashima Yoshiaki
Advanced Research Laboratory Toshiba Research And Development Center
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Terashima Yoshiaki
The Authors Are With Toshiba
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Terashima Yoshiaki
Advanced Research Laboratory R & D Center Toshiba Corporation
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SAGOI Masayuki
Advanced Research Laboratory, Toshiba R&D Center
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Miura T
Department Of Electrical & Electronic Engineering Yamaguchi University
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Sagoi M
Toshiba Corp. Kawasaki Jpn
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Terashima Y
Toshiba Research And Development Center Kawasaki
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MIURA Tadao
Advanced Reseach Laboratory, Toshiba Reseach and Development, Center
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SAGOI Masayuki
Advanced Research Laboratory, Toshiba R&D Center
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