Phase Control of Bi-Sr-Ca-Cu-O Thin Films Prepared by Coevaporation with RF Oxygen Plasma
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概要
- 論文の詳細を見る
Thin films of Bi-Sr-Ca-Cu-O were prepared on (100)SrTiO_3 substrates by coevaporation with rf oxygen plasma. It has been confirmed that the structural phases of films can be controlled mainly by the flux density of activated oxygen and the substrate temperature, and not by the chemical compositions of the films. Thin films in the Bi_2(Sr, Ca)_3Cu_2O_y phase and the Bi_2(Sr, Ca)_2CuO_y phase were prepared by changing the flux density of activated oxygen and the substrate temperature. The films in the Bi_2(Sr, Ca)_3Cu_2O_y phase showed superconducting transitions at 35 K.
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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TERASHIMA Yoshiaki
Toshiba Research and Development Center
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MIURA Tadao
Toshiba Research and Development Center
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MIURA Tatsuro
Department of Applied Physics, Graduate School of Engineering, Tohoku University
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Terashima Yoshiaki
Advanced Research Laboratory Toshiba Research And Development Center
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Terashima Yoshiaki
The Authors Are With Toshiba
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Miura T
Department Of Electrical & Electronic Engineering Yamaguchi University
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Miura Tadao
Toshiba Corporation
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Ishizuka Yoshiki
Toshiba Research & Development Center, Toshiba Corporation
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Terashima Y
Toshiba Research And Development Center Kawasaki
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Ishizuka Yoshiki
Toshiba Research & Development Center Toshiba Corporation
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