Crystalline Orientation Control for Bi-Sr-Ca-Cu-O Thin Films Prepared on (110)SrTiO_3 by Coevaporation
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概要
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Superconducting BY-Sr-Ca-Cu-O thin films were prepared on (110)SrTiO_3 su bstrates by coevaporation with an rf oxygen plasma. Four orientation categories were observed, the 2223-phase (119) orientation, the 2212-phase (119) orientation, the 2212-phase (117) orientation, and the 2212-phase (00n) orientation. It has been confirmed that these orientations can be controlled by changing the rf oxygen plasma conditions. The (00n) orientation grew as the oxygen flow rate increased or as the rf power increased.
- 社団法人応用物理学会の論文
- 1991-06-01
著者
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TERASHIMA Yoshiaki
Toshiba Research and Development Center
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MIURA Tadao
Toshiba Research and Development Center
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MIURA Tatsuro
Department of Applied Physics, Graduate School of Engineering, Tohoku University
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Terashima Yoshiaki
Advanced Research Laboratory Toshiba Research And Development Center
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Terashima Yoshiaki
The Authors Are With Toshiba
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Miura T
Department Of Electrical & Electronic Engineering Yamaguchi University
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Miura Tadao
Toshiba Corporation
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Ishizuka Yoshiki
Toshiba Research & Development Center, Toshiba Corporation
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Terashima Y
Toshiba Research And Development Center Kawasaki
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Ishizuka Yoshiki
Toshiba Research & Development Center Toshiba Corporation
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