Detection and Imaging of Subsurface Microcracks in Silicon Wafers Using Photoacoustic Microscope : Photoacoustic Spectroscopy and Ultrasonic Imaging
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-05-31
著者
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Kitamori Takehiko
Department F Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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Kembo Yukio
Production Engineering Research Laboratory Hitachi Ltd.
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Sawada Tsuguo
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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Sawada Tsuguo
Department F Industrial Chemistry Faculty Of Engineering The University Of Tokyo
-
Kitamori Takehiko
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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NAKATA Toshihiko
Production Engineering Research Laboratory, Hitachi, Ltd.
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Nakata T
Ion Engineering Res. Inst. Corp. Osaka Jpn
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Nakata Toshihiko
Production Engineering Research Laboratory Hitachi Ltd.
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