Kembo Yukio | Production Engineering Research Laboratory Hitachi Ltd.
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概要
関連著者
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Kembo Yukio
Production Engineering Research Laboratory Hitachi Ltd.
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Kitamori Takehiko
Department F Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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Kembo Yukio
Hitachi Kenki Fine Tech Co. Ltd.
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Sawada Tsuguo
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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Sawada Tsuguo
Department F Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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Kembo Y
Hitachi Kenki Fine Tech Co. Ltd.
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NOGUCHI Michitoshi
Institute of Engineeering Mechanics and Systems, University of Tsukuba
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NOGUCHI Minori
Production Engineering Research Laboratory, Hitachi, Ltd.,
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Kitamori Takehiko
Department Of Industrial Chemistry Faculty Of Engineering The University Of Tokyo
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NAKATA Toshihiko
Production Engineering Research Laboratory, Hitachi, Ltd.
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Noguchi M
Institute Of Engineeering Mechanics And Systems University Of Tsukuba
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Nakata T
Ion Engineering Res. Inst. Corp. Osaka Jpn
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Nakata Toshihiko
Production Engineering Research Laboratory Hitachi Ltd.
著作論文
- Fine Particle Inspection Down to 38 nm on Bare Wafer with Micro Roughness by Side-Scattering Light Detection
- Detection and Imaging of Subsurface Microcracks in Silicon Wafers Using Photoacoustic Microscope : Photoacoustic Spectroscopy and Ultrasonic Imaging