Particle Detection for Patterned Wafers Using Hybrid Optical-Digital Image Processing : Inspection and Testing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-12-30

著者

• Akiyama Nobuyuki

  Production Engineering Research Laboratory Hitachi Ltd.

• NAKATA Toshihiko

  Production Engineering Research Laboratory, Hitachi, Ltd.

• Nakata Toshihiko

  Production Engineering Research Laboratory Hitachi Ltd.

• AKIYAMA Nobuyuki

  production Engineering Research Laboratory, Hitachi, Ltd.

関連論文

• Detection and Imaging of Subsurface Microcracks in Silicon Wafers Using Photoacoustic Microscope : Photoacoustic Spectroscopy and Ultrasonic Imaging
• Particle Detection for Patterned Wafers Using Hybrid Optical-Digital Image Processing : Inspection and Testing
• Analysis and Synthesis of a Pressure Compensated Deceleration Valve
• The Discharge Coefficient of Spool Type Hydraulic Valve : 3rd Report, The Taper Land Spool Valve
• Common-Path Double-Pass Optical Interferometry Using a Wire-Grid Polarizer as a Reference Mirror
• Particle Detection for Patterned Wafers Using Hybrid Optical-Digital Image Processing

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