A High-Capacitance Trench Structure (Hi-CAT) for Megabit LSI Memories
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-07-20
著者
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YONEDA Masahiro
LSI Research and Development Labotary, Mitsubishi Electric Corporation
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Fujishima Kazuyasu
Lsi Research & Development Lab.
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Fujishima Kazuyasu
Lsi R&d Laboratory Mitsubishi Electric Corporation
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SATOH Shin-ichi
LSI R&D Laboratory, Mitsubishi Electric Corporation,
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YAMAZAKI Teruhiko
LSI R&D Laboratory, Mitsubishi Electric Corporation,
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Yamazaki Teruhiko
Lsi R & D Laboratory Mitsubishi Electric Corporation
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Yamazaki Teruhiko
Lsi R&d Laboratory Mitsubishi Electric Corporation
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Satoh Shin-ichi
Lsi R & D Laboratory Mitsubishi Electric Corporation
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Yoneda Masahiro
Lsi R&d Laboratory Mitsubishi Electric Corporation
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Satoh Shin-ichi
Lsi R&d Laboratory Mitsubishi Electric Corporation
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Yamazaki Takashi
Division Of Electronic And Information Engineering Graduate School Of Technology Tokyo University Of
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