Measurement of the Out-Diffusion Profile of Oxygen in Silicon
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概要
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The concentration profile of out-diffused oxygen in Czochralski silicon crystals has been measured in identical specimens by X-ray lattice parameter measurement, charged-particle activation analysis, and spreading-resistance measurement after thermal donor formation. The experimental profiles obtained by the X-ray method and charged-particle activation analysis were consistent, but the spreading-resistance method yielded less reliable results. The surface concentration of oxygen is discussed on the basis of Henry's law.
- 社団法人応用物理学会の論文
- 1985-10-20
著者
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Watanabe Toshihide
Nhk Science And Technical Research Laboratories
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SUGITA Yoshimitsu
Department of Physics, Toyama University
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Okabe Toshio
Department Of Physics Faculty Of Science Kyoto University
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Nozaki Tadashi
The Institute Of Physical And Chemical Research
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Kawata Hiroshi
Department of Physics, Tokyo Institute of Technology
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Itoh Yoshiko
The Institute Of Physical And Chemical Research (riken)
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Itoh Yoshiko
The Institute Of Physical And Chemical Research
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NAKAMICHI Shuhei
Department of Physics, Toyama University
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YOSHIKAWA Shigeo
NHK Science and Technical Research Laboratories
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Nakamichi Shuhei
Department Of Physics Toyama University:hitachi-maxell Co.
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Sugita Yoshimitsu
Department Of Physics Toyama University
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Kawata Hiroshi
Department Of Physics Toyama University:national Laboratory For High Energy Physics
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Kawata Hiroshi
Department Of Physics Tokyo Institute Of Technology
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