Simultaneous Charged Particle Activation Analysis of Carbon and Boron in Gallium Arsenide
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概要
- 論文の詳細を見る
A simple method has been developed for simultaneous determination of carbon and boron in GaAs by deuteron activation analysis. The detection limit is 2×10^<14> atoms・cm^<-3> for both elements. The determined carbon concentrations are compared with the results of IR spectrophotometry.
- 社団法人応用物理学会の論文
- 1985-10-20
著者
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Ohkubo Yoshitaka
The Institute of Physical and Chemical Research (RIKEN)
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Nozaki Tadashi
The Institute Of Physical And Chemical Research
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Itoh Yoshiko
The Institute Of Physical And Chemical Research
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Kimura Toshimasa
Japan Chemical Analysis Center
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Fukushima Hiroto
Japan Chemical Analysis Center
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Ohkubo Y
The Institute Of Physical And Chemical Research
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Ohkubo Yoshitaka
The Institute of Physical and Chemical Research
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Fukushima Hiroto
Japan Analysis Center, Sannou, Chibashi, Chiba 281
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