Directional Plasma CVD Technology for Sub-quarter-micron Feature Size Multilevel Interconnections
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-30
著者
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Furusawa Takeshi
Central Research Laboratory Hitachi Ltd.
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Sakuma N
Toshiba Corp. Kawasaki Jpn
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Kudoh Yukie
Hitachi Electronics Engineering Co. Ltd.
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HOMMA Yoshio
Central Research Laboratory, Hitachi, Ltd.
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Sakuma Noriyuki
Central Research Laboratory Hitachi Ltd.
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Furusawa T
Tokyo Inst. Technol. Yokohama
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Kusukawa Kikuo
Central Research Laboratory Hitachi Ltd.
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Homma Y
Hitachi Ltd. Tokyo Jpn
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Homma Yoshio
Central Research Laboratory Hitachi Ltd.
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KUDOH Yutaka
Hitachi Electronics Engineering Co. Ltd.
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Homma Toshio
Central Research Laboratory, Hitachi, Ltd.
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