Furusawa Takeshi | Central Research Laboratory Hitachi Ltd.
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概要
関連著者
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Furusawa Takeshi
Central Research Laboratory Hitachi Ltd.
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Homma Yoshio
Central Research Laboratory Hitachi Ltd.
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HOMMA Yoshio
Central Research Laboratory, Hitachi, Ltd.
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Furusawa T
Tokyo Inst. Technol. Yokohama
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Homma Y
Hitachi Ltd. Tokyo Jpn
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Sakuma N
Toshiba Corp. Kawasaki Jpn
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Kudoh Yukie
Hitachi Electronics Engineering Co. Ltd.
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Sakuma Noriyuki
Central Research Laboratory Hitachi Ltd.
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Kusukawa Kikuo
Central Research Laboratory Hitachi Ltd.
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KUDOH Yutaka
Hitachi Electronics Engineering Co. Ltd.
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Morishima Hiroyuki
Hitachi Chemical Co. Ltd.
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MORIYAMA Shigeo
Central Research Laboratory, Hitachi Ltd.
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SATO Hidetada
Hitachi Chemical Co. Ltd.
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Moriyama Shigeo
Central Research Laboratory Hitachi Ltd.
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Homma Toshio
Central Research Laboratory, Hitachi, Ltd.
著作論文
- Heat and Moisture Resistance of Low-Capacitance Multilevel Interconnections Using Low-Permittivity Organic Spin-On Glass
- Directional Plasma CVD Technology for Sub-quarter-micron Feature Size Multilevel Interconnections
- Directional Plasma CVD Technology for Sub-Quarter Micrometer Feature Size Multilevel Interconnection
- Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs
- Reliability of Low-Parasitic-Capacitance Multilevel Interconnection Using Surface-Densified Low-ε Organic Spin-on Glass