Roughness Evaluation of Thermally Oxidized Si(111) Surfaces by Scanning Force Microscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-03-30
著者
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SUZUKI Mineharu
Center for Analytical Technology and Characterization, NTT Interdisciplinary Research Laboratories
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HOMMA Yoshikazu
Center for Analytical Technology and Characterization, NTT Interdisciplinary Research Laboratories
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Yabumoto N
Ntt Interdisciplinary Lab. Musashino Jpn
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Yabumoto Norikuni
Ntt Interdisciplinary Research Laboratories Ntt Advanced Technology Corporation
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KUDOH Yukie
Center for Analytical Technology and Characterization, NTT Interdisciplinary Research Laboratories
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YABUMOTO Norikuni
Center for Analytical Technology and Characterization, NTT Interdisciplinary Research Laboratories
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Kudoh Yukie
Hitachi Electronics Engineering Co. Ltd.
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Suzuki Mineharu
Center For Analytical Technology And Characterization Ntt Interdisciplinary Research Laboratories
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Homma Yoshikazu
Center For Analytical Technology And Characterization Ntt Interdisciplinary Research Laboratories
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