Defect Formation during Hetero-Epitaxial Growth of Aluminum Nitride Thin Films on 6H-Silicon Carbide by Gas-Source Molecular Beam Epitaxy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-03-15
著者
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Davis R
North Carolina State Univ. North Carolina
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Tanaka Satoru
Department of Pediatrics, Graduate School of Medical and Dental Sciences, Kagoshima University
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KERN R.Scott
Department of Materials Science and Engineering, North Carolina State University
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BENTLEY Jamas
Metals and Ceramics Division, Oak Ridge National Laboratory
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DAVIS Robert
Department of Materials Science and Engineering, North Carolina State University
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Tanaka Satoru
Department Of Cardiovascular Medicine Gifu Pref. Govt. Tajimi Hospital
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Kern R.scott
Department Of Materials Science And Engineering North Carolina State University
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Davis Robert
Department Of Materials Science And Engineering North Carolina State University
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Bentley Jamas
Metals And Ceramics Division Oak Ridge National Laboratory
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Tanaka Satoru
Department Of Anesthesiology Sapporo Medical University School Of Medicine
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