Etching of Thermally Grown SiO_2 by NH_4OH in Mixture of NH_4OH and H_2O_2 Cleaning Solution
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概要
- 論文の詳細を見る
We have investigated the etching behavior of thermally grown SiO_2 by ammonium hydroxide (NH_4OH) in NH_4OH-H_2O_2-H_2O cleaning solution (SC-1). The SiO_2 etching rate increases with increasing impurity (boron or phosphorus) concentration in the SiO_2 as well as concentration of NH_4OH and temperature of SC-1 solution. Moreover, postoxidation SC-1 treatment with a low concentration of NH_4OH (less than 3.15 wt% of NH_4OH) does not degrade or improve oxide reliability. These indicate that if SC-1 treatment, which is performed after post-thin-oxide (〜2O nm) or high-impurity-doped Si oxide formation, is carried out in ULSI device fabrication processes, SC-1 with low temperature and low NH_4OH concentration must be applied after those processes to minimize SiO_2 thickness reduction and preserve oxide reliability.
- 社団法人応用物理学会の論文
- 1994-07-15
著者
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Yamamoto Koji
Department of Internal Medicine, Hattori Memorial Hospital
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Shigematsu Yasuhiro
Department Of Process Engineering Vlsi Division Rohm Co. Ltd.
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KAIGAWA Hiroyuki
Department of Process Engineering, VLSI Division, Rohm Co., Ltd.
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Kaigawa Hiroyuki
Department Of Process Engineering Vlsi Division Rohm Co. Ltd.
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