Deposition and Characterization of Ferroelectric Pb[(Mg_<1/3>Nb_<2/3>)_xTi_<1-x>]0_3 Thin Films by RF Magnetron Sputtering
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概要
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Ferroelectric Pb[(Mg_1/3Nb_2/3)_xTi_<1-x>]0_3 (PMNT) thin films with a well-developed perovskite structure were pre-pared on Si(1OO) and Pt/Ti/SiO_2/Si(1OO) substrates by rf magnetron sputtering deposition at high substrate termperatures of 480-650℃. The effect of substrate materials was investigated by X-ray diffraction analysis. The substrates that were topped with a Pt/Ti electrode exhibited a significant effect on reducing the perovskite phase formation temperature of PMNT films; in addition, the TiO_2 rutile phase was found to be formed at the interfacebetween the PMNT film and Pt electrode. It was discovered that the TiO_3 rutile phase would degrade the dielectric and ferroelectric properties of the PMNT films. The 0.5-μm-thick perovskite PMNT films of x =O.3-0.5 exhibited a high dielectric constant (A;) of 1000-1300, and a dissipation factor less than 0.04 at 1 kHz. Moreover, the films showed satisfactory ferroelectric characteristics. The remanent polarization (P_r) or coercive field (E_c)ranged from 23.57μC/cm^2 and 82.5 kV/cm, respectively, for 10 PMNT (x=O.1) to 10.2 μC/cm^2 and 49 kV/cm for 50 PMNT (x=0.5) thin films. Due to the formation of a relatively thick TiO_2 interface layer at a high deposition temperature, the 70 PMNT (x=O.7) films did not show satisfactory dielectric or ferroelectric properties. However, by adding 3 mo1% La on the PMNT to reduce the perovskite formation temperature, a 0.5-μm-thick Pb_0.97Lag_<0.03>Mg_<0.235>Nb_<0.44>Ti_<0.325> (PLMNT) film was prepared on the Pt/Ti/SiO_2/Si substrate, and results of P_r=8.5 μC/cm^2, E_c=46 kV/cm with k=122O and tan g<0.04 were obtained.
- 社団法人応用物理学会の論文
- 1994-11-15
著者
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Hong T‐j
National Tsing Hua Univ. Hsinchu Twn
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Hong Tian-jue
Department Of Materials Science And Engineering National Tsing Hua University
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Jiang M‐c
National Tsing Hua Univ. Hsinchu Twn
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Jiang Ming-chrong
Department Of Materials Science And Engineering National Tsing Hua University
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WU Tai-Bor
Department of Materials Science and Engineering, National Tsing Hua University
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Wu Tai-bor
Department Of Material Science And Engineering National Tsing Hua University
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