Measurement of Plasma Flow of Mixture of Metal Vapor and Nitrogen in Shock Wave Deposition
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概要
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The plasma flow of a mixture of metal vapor and nitrogen in shock wave deposition has been investigated by means of an image converter camera and a Mach-Zehnder interferometer at the shock velocity of υ=4.9〜6.0km/s with the initial pressure of P_1=0.1〜2.0 Torr. The separation of the shock front between N_2 and Mo was observed at P_1=0.1 Torr, but not at P_1≧1.0 Torr. The density of nitrogen molecules behind the shock front was measured to be 3.47×10^<17> cm^<-3> for P_1=1.0 Torr and υ=4.9 km/s. The deposited films of MoN and TiN were found to be composed of fine-grained polycrystals with FCC structure, and their lattice constant was estimated to be 0.422 nm and 0.426 nm, respectively.
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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EZUMI Hiromichi
Department of Fundamental Education, Shimane College of Nursing
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Osono H
Department Of Electrical Engineering Hiroshima-denki Institute Of Technology
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Osono H
Faculty Of Engineering Hiroshima Kokusai Gakuin University
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Ezumi Hiromichi
Department Of Electrical Engineering Hiroshima Denki Institute Of Technology:department Of Fundament
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OSONO Hiroto
Department of Technology, Hiroshima Kokusai Gakuin University
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KUWAHARA Kaizo
Department of Electrical Engineering, Hiroshima-Denki, Institute of Technology
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Kuwahara K
Department Of Electrical Engineering Hiroshima-denki Institute Of Technology
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EZUMI Hiromichi
Department of Electrical Engineering, Hiroshima-Denki, Institute of Technology
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