Residual Compression in Ni Film Prepared by Laser Ablation
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概要
- 論文の詳細を見る
Large residual compression with the value of (3〜4)10^9 N/m^2 has been observed in Ni films prepared by the laser ablation method using a YAG laser. The origin of compression has been discussed based on the results of X-ray diffraction, streak image of ablated particles and spectrum of the plume. These experiments showed that excited Ni atoms combined with nitrogen remaining in the vacuum chamber and formed nitride (Ni_3N) which caused compression in the film.
- 社団法人応用物理学会の論文
- 1994-01-15
著者
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Ezumi Hiromichi
Department Of Electrical Engineering Hiroshima Denki Institute Of Technology:department Of Fundament
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Keitoku Susumu
Hiroshima Women's University
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Keitoku Susumu
Hiroshima Wamen's College
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