Contribution of High-Velocity Particles to Stress of Thin Film Produced by Laser Ablation
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概要
- 論文の詳細を見る
The origin of stress in thin CuInSe_2 films produced by laser ablation is investigated by the observation of the laser plume using the multichannel spectrometer and the laser transmittance method. As the laser energy density on the target increases above 1J / cm^2, the fraction of fast particles (atoms and ions) decreases and that of slow particles (droplets) increases. The stress in the thin film is the greatest at 1J / cm^2, and decreases below and above 1J / cm^2. From these results it is clear that the compressive stress of the thin film is caused by the peening effect due to the incidence of fast atoms and ions, and the slow, heavy species contribute to the relaxation of stress.
- 社団法人応用物理学会の論文
- 1997-04-01
著者
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Sakai Hisashi
Department Of Electric Engineering Hiroshima-denki Institute Of Technology
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Ezumi Hiromichi
Shimane Nursing College
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Keitoku Susumu
Hiroshima Wamen's College
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Sakai Hisashi
Department Of Electric Engineering Hiroshima Denki Institute Of Technology
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