Influence of Pulse Width on CdS Film Prepared by YAG Laser Ablation
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概要
- 論文の詳細を見る
CdS films were deposited on glass substrates using two kinds of YAG lasers: one with a long pulse width of τ=100 μs and one with a short pulse width of τ=15 ns. Scanning electron microscopy observation and X-ray diffraction patterns showed that the film formed by the long pulse laser with a low energy density has a smooth surface and highly oriented texture. Resistivity is distributed in a wide range: 100-2000 Ω・cm and 10-100 Ω・cm for the films formed by long and short pulse lasers, respectively. Measurement of optical transmission spectra suggests the existence of an impurity level in the low resistivity film. Streak image of the plume obtained using an image converter camera showed that the average velocity of ablated luminous particles is about 5 × 10^4 cm/s for long pulse laser ablation and (3-9) × 10^5 cm/s for the short one.
- 社団法人応用物理学会の論文
- 1993-04-15
著者
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Ezumi Hiromichi
Department Of Electrical Engineering Hiroshima Denki Institute Of Technology:department Of Fundament
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Ezumi Hiromichi
Department Of Electrical Engineering Hiroshima-denki Institute Of Technology
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Keitoku S
Hiroshima Women's Univ. Hiroshima Jpn
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Keitoku Susumu
Hiroshima Wamen's College
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