Probable Errors in the Internal Reflection Method for Optical Constant Measurements
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概要
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The internal reflection method (IRM), recently developed for optical constant measurements of deposited films, was investigated in terms of probable errors. The optimum angle of incidence for IRM was shown to lie in the range of 60°-75°. With these incident angles, IRM using a fused-silica prism demonstrated the effect of reducing the probable errors to a few tenths of those in the ordinary free surface reflection method.
- 社団法人応用物理学会の論文
- 1992-12-15
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