Low-Temperature Metalorganic Chemical Vapor Deposition of GaAs on Si by Alternate Gas Flow of the Source Materials
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-02-15
著者
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Fujita K
Kyoto Univ. Kyoto Jpn
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Matsuda Yuko
Central R & D Laboratory Japan Energy Corporation
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Matsuda Yasushi
Advanced Technology Research Laboratories Sumitomo Metal Industries Ltd.
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Matsuda Y
Central R & D Laboratory Japan Energy Corporation
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FUJITA Kazuhisa
Advanced Technology Research Laboratories, Sumitomo Metal Industries, Ltd.
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KANAO Hiroto
Advanced Technology Research Laboratories, Sumitomo Metal Industries, Ltd.
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Kanao H
Advanced Technology Research Laboratories Sumitomo Metal Industries Ltd.
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Kanao Hiroto
Advanced Technology Research Laboratories Sumitomo Metal Industries Ltd.
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Fujita Kazuhisa
Advanced Technology Research Laboratories Sumitomo Metal Industries Ltd.
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