Electron Energy Analysis by a Cylindrical Magnetic Lens
スポンサーリンク
概要
- 論文の詳細を見る
Cylindrical magnetic lenses were developed with the aim of energy analysis of electrons. A set magnetic pole-pieces with rectangular apertures was inserted into the bore of the intermediate lens of a usual electron microscope and was used as an analyzer lens. It has a large chromatic aberration constant for off-axial rays when it was energized to a lens strength k≃√<3>. An image of specimen was formed by the objective lens on a slit plane of the field limiting aperture. The energy of electrons which had passed through the slit was analyzed by the analyzer lens and the energy loss spectrum of the limited image was obtained perendicularly to the slit length with an energy resolution of 1 eV at 80 kV. Lens action of the analyzer lens and experimental procedures for energy analysis are described in details. Some results of energy analysis are shown for several specimens of various thicknesses. The energy resolution and position resolution of this analyzer are discussed for a few practical cases.
- 社団法人応用物理学会の論文
- 1968-08-05
著者
関連論文
- Electro- and Thermomigration of Metallic Islands on Si(100) Surface
- A New Normalization Method for the Electron Energy-Loss Spectrum
- Experimental Study of Inelastic Process at the Crystal Surface in Angle Resolved Low-Energy Electron Energy Loss Spectroscopy
- On Anomalous Phase Change of Ammonium Nitrate NH_4NO_3.
- Effect of Stress on Domain Structure of Tungsten Trioxide WO_3.
- Kikuchi Patterns and Inelastic Scattering
- Energy Analysis of Kikuchi Patterns
- Charging Effect of Specimen in Scanning Electron Microscopy
- Electron Energy Analysis by a Cylindrical Magnetic Lens
- Absorbed Specimen Current Anomaly of Cu-Zn Diffusion Couple in Electron Scanning Microscope
- Observation of Crystal Defects by Pseudo-Kissed Lines on X-Ray Projection Micrograph
- Pseudo-Kikuchi Patterns in Reduced Scanning Region for Monocrystals of Silicon
- Effect of Electron Source to Energy Resolution in Electron Velocity Analysis : Interpretation of Boersch Effect
- Density Effect of X-Ray Emission from Porous Specimens in Quantitative Electron Probe Microanalysis
- Valiation of X-Ray Emission from GaAs Single Crystal with Incident Electron Beam Direction
- Contrast Reversals of Pseudo-Kikuchi Band and Lines Due to Detector Position in Scanning Electron Microscopy
- X-Ray Microdiffraction with a Scanning X-Ray Microanalyzer
- Measurements of Ratio of Abnomal to Normal Absorption Coefficients for Electrons in Crystal from Pseudo-Kikuchi Patterns
- Contrast Reversal of Kikuchi Bands in Transmission Electron Diffraction
- Measurements of Evaporated Film Thickness and Concentration by Electron Probe X-Ray Microanalyzer
- Simple Electron Monochromator of Three-Diaphragm Einzel Lens