Simple Electron Monochromator of Three-Diaphragm Einzel Lens
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概要
- 論文の詳細を見る
A three-diaphragm einzel lens is utilized as an electron monochromator of a usual electron microscope. An energy dispersion of the monochromator of 1.5 mm/Volt is obtained in an appropriate operating condition at the accelerating voltage of 50 kV. Thus the estimated energy resolution becomes 10 mV by using an energy selecting aperture of 15 μmφ. The beam current passed through the energy selecting aperture of 90 μmφ (an energy spread is 60 mV) is one-twentieth of a total beam current of a non-monochromatic beam. The construction and performance of the monochromator are described, and it is suggested that some advantages are obtained in the high resolution electron loss spectroscopy when the monochromator is used in common with the 2nd condenser lens.
- 社団法人応用物理学会の論文
- 1973-02-05
著者
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Komuro Masanori
Department Of Applied Physics Waseda University
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Ichinokawa Takeo
Department Of Applied Physics School Of Science And Engineering Waseda University
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OHYAMA Takashi
Department of Applied Physics, Waseda University
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KOMURO Masanori
Department of Applied Physics, Waseda University
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