スパッタ膜のパターン形成用金属マスクの有限要素法熱変形解析

概要

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The thermal deformation of a metal mask for the pattern formation of sputtered films by deposition through it was analyzed by the finite element method. The mask made of stainless steel 0.3 mm thick included a rectangular frame and many beams running inside the frame. The frame was fixed to a substrate holder. In order to analyze the deformation, the temperature of the mask during deposition was measured to be about 170℃. Under these conditions, the deformation of the beams was calculated by using the elastic theory. The calculated result reproduced the measured one. The influence of the temperature and the thickness of the mask was also investigated by calculation.
日本シミュレーション学会の論文
2001-03-15