Thermally Controlled Magnetization Actuator for Microrelays (Special Issue on Micromachine Technology)
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概要
- 論文の詳細を見る
A thermally controlled magnetization actuator (TCMA) is proposed for micro-mechanical relays. It is actuated by changing the local magnetization of the structure by remote heating using a laser beam. It is fabricated by nickel surface micromachining (a fabrication technique using nickel electro-plating). The optical power of the laser diode used to drive the TCMA is about 30mW. The switching time of the microrelay was experimentally measured to be 10ms, the same as that of a conventional mechanical relay. The contact force was calculated to be 20μN, which can be improved by increasing the size of the TCMA.
- 社団法人電子情報通信学会の論文
- 1997-02-25
著者
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田中 秀尚
Ntt境界領域研究所
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田中 秀尚
日本電信電話株式会社 Nttサイバースペース研究所
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Tanaka H
Ntt Integrated Information Amp Energy Systems Laboratories
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Tanaka H
Ntt Interdisciplinary Research Laboratories
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Tanaka Hidenao
Ntt Integrated Information & Energy Systems Laboratories
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Tanaka Hidenao
The Authors Are With Ntt Cyber Space Laboratories
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HASHIMOTO Etsu
NTT Opto-electronics Laboratories
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SUZUKI Yoshio
NTT Opto-electronics Laboratories
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UENISHI Yuji
NTT Opto-electronics Laboratories
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WATABE Akinori
NTT Intellectual Property Department
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Watabe A
Ntt Intellectual Property Department
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