Measurement of Anisotropic Elastic Moduli in Local Area by Acoustic Microscope : The Case of Cubic Single Crystal
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概要
- 論文の詳細を見る
In this paper, a new method is suggested for the nondestructive measurement of elastic moduli on the local surface of an anisotropic material by an amplitude and phase acoustic microscope. It is confirmed that the anisotropic wave velocities in a local area are determined from the complex V(z)curve measured by a line-focus acoustic lens. The experimental analyses were carried out for single crystal of cubic system, (001)face of gallium arsenide, with water or mercury as the coupler. The velocity of the surface wave was clearly seen when the acoustic impedance of the coupler was smaller than that of the specimen. The velocity of the longitudinal wave was successfully measured, provided the acoustic impedance of the coupler was comparable to that of the specimen. Then, the elastic moduli in a single crystal of gallium arsenide was determined from the measured longitudinal and surface wave velocities according to elastodynamic theory. It was shown that the present method is very useful in determining the anisotropic elastic moduli of a cubic system in a local area.
- 一般社団法人日本機械学会の論文
- 1998-07-15
著者
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Adachi Tadaharu
Department Of Mechanical Engineering And Science Tokyo Institute Of Technology
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Matsumoto Hiroyuki
Department of Electrical Engineering, Toyo University
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Adachi Taiji
Department Of Mechanical Engineering And Science Tokyo Institute Of Technology
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Nishida Masahiro
Department Of Information And Computer Science Faculty Of Science And Technology Keio University
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ENDO Tomio
Product Development, Olympus Optical Co., Ltd.
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Endo T
Product Development Olympus Optical Co. Ltd.
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Nishida Masahiro
Department Of Mechanical Engineering And Science Tokyo Institute Of Technology:(present Adress)depar
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Matsumoto H
Information Security Systems Division Nhk Spring Co. Ltd.
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Nishida Masahiro
Department Of Engineering Physics Electronics And Mechanics Graduate School Nagoya Institute Of Tech
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Matsumoto Hiroyuki
Department Of Biochemistry And Molecular Biology University Of Oklahoma Health Sciences Center
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Matsumoto Yukinori
Department of Mechanical Engineering and Science, Tokyo Institute of Technology
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