Fe基アモルファス軟磁性膜を用いる交換結合型裏打ち層の作製(磁気記録)

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Fe-based amorphous soft-magnetic films and Mn-Ir exchangebiasing films were investigated, with the aim of developing a soft-magnetic underlayer for L1_0-type Fe-Pt perpendicular double-1ayered media. It was found that a carbon-added Fe_<78>SI_9B_<13> composition film had a smooth surface and excellent structural stability in amorphous state after annealing at 450℃. A B value of 13.7 kG and an H_c value of below 1 Oe for the easy axis were obtained. For the exchange-biased films, the compositions and crystal orientations of the Mn-Ir films and the effects of inserting a Co-Fe layer between the Fe-Si-B-C layer and the Mn-Ir layer were investigated. As a result, a large unidirectional anisotropy constant, J_k, of 0.5 erg/cm^2 was obtained for a layer configuration of Fe-Si-B-C (50 nm)/Co Fe (5 nm)/Mn_<85>Ir_<15>(10 nm)/Nb-Permalloy (5 nm)/Ta(20 nm)/glasssubstrate. The large exchange-bias field, small coercivity, smooth surface, and excellent structural stability of the film will be suitable for the soft-magnetic underlayer of Fe-Pt media.
2004-03-01