高飽和磁化Fe-Co-Al-O薄膜の軟磁気特性(ソフト磁性材料)

概要

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Fe-Co and Fe-Co-Al-O films were prepared by RF magnetron sputtering in Ar gas atmosphere. An H_<ch> (coercivity in the hard axis direction) value of 11 Oe (0.88 kA/m) was obtained for an Fe-Co film by choosing proper sputtering condition. H_<ch> was greatly decreased by using Al_2O_3 addition of 1% and a Ni-Fe underlayer of 0.5-12 nm, resulting in a value less than 1 Oe (80 A/m) for a film thickness range from 50 nm to 600 nm. Amorphous Co-Zr-Nb soft magnetic underlayer films are also effective for obtaining H_<ch> values less than 1 Oe (80 A/m). It is finally concluded that combination of a small amount of Al_2O_3 addition and a soft magnetic underlayer film is essential for obtaining low H_<ch> with high saturation magnetic flux density of 2.4 T in a wide range of film thicknesses.
社団法人日本磁気学会の論文
2003-04-01