X線透視付LEC法装置開発と結晶成長その場観察

概要

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A new high pressure LEC pulling system with an X-ray imaging apparatus has been developed. We have widely applied this system for in-situ observation of III-V crystal growth, development of novel synthesis and growth technique, and fundamental studies such as fluid flow analysis. The system composed of an in-house modified high pressure puller, MSR-6RA (Cambridge Instrument Co.) and an X-ray imager linked to a real-time image processor which suppresses the back ground noise and enhances the X-ray image. In-situ observation of the meniscus clarifies the relationship between its shape and the crystallinity in the seeding procedure. The observation of the solid-liquid interface during LEC GaAs crystal growth has been achieved for the first time. The difference between the crystal diameter calculated from the derivative weight gain signal and real diameter observed by X-ray image was analyzed.
日本結晶成長学会の論文
1988-01-25