F209 酸化物単結晶内熱応力に及ぼす融液内対流及び内部輻射伝熱の影響(オーガナイズドセッション17 : 材料およびデバイス製造の熱工学)

概要

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A three-dimensional finite element analysis of thermal stress fields in oxide crystals grown by the CZ method have been carried out, where the crystal was assumed to be a linear elastic material whose mechanical properties are anisotropic. The von Mises equivalent stresses in the semitransparent crystals were calculated with the temperature distributions obtained by the global heat transfer analysis in the CZ furnace taking into account the radiative heat transfer in the crystal The effect of the absorption coefficients of the crystal on the thermal stress fields in the crystal were numerically investigated as well as the effect of the interface inversion
社団法人日本機械学会の論文
2001-11-03