22pA7 Si Cz炉総合熱流動解析(バルク成長シンポジウム)

概要

論文の詳細を見る
A large scale numerical code was developed for a global analysis of silicon Cz furnace to understand transport phenomena in details. The code is composed of four major element codes each of which analyzes transport phenomena in the gas, melt and solid phases and the radiative heat transfer between partly specular surfaces. Each code has been developed by the research project members. Separately. A main program was developed to manage the exchanges of velocity, temperature and concentration values and fluxes at each phase boundaries and also to process the trials for convergence.
日本結晶成長学会の論文
1999-07-01