F-1107 付加質量形AFMプローブの接触共振による微小領域弾性計測の高感度化(J25-2 光学的手法・弾性的性質)(J25 機械力学,材料力学,エンジン関連の計測技術)

概要

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In dynamic atomic force microscopy (AFM) for detecting local elastic properties of samples, it is desirable that the contact resonance of an AFM cantilever is sensitive to tip-sample contact stiffness. This paper presents a unique cantilever with its mass concentrated as a way of enhancing the sensitivity. The cantilever is made up of a commercially available normal cantilever and a tungsten particle adhesively attached to the free end. Spectra of the contact vibrations are measured for three sample materials. The mass-concentrating cantilever whose tip is in contact with a sample exhibits a distinguishing spectrum containing several resonant peaks. A meaningful resonant peak affected significantly by contact stiffness can be found out among them because the other trivial peaks coincide with those for the cantilever free from a sample. If the attached mass is about four times larger than the distributed (cantilever) mass, the resonant peak obeys a spring-mass model. This means that the cantilever with its mass concentrated can provide the maximum sensitivity even for stiff materials.
一般社団法人日本機械学会の論文
2001-08-22