203 原子間力超音波顕微鏡の高感度化によるDLCナノ薄膜の弾性率評価(GS2 ナノ23)

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We present a method for characterizing ultrathin films using sensitivity-enhanced atomic force acoustic microscopy, where a concentrated-mass cantilever having a flat tip was used as a sensitive oscillator. Evaluation was aimed at 6-nm-thick and 10-nm-thick diamond-like carbon (DLC) films deposited, using different methods, on a hard disk for the effective Young's modulus defined as E/ (1-v^2), where E is the Young's modulus and v is the Poisson's ratio. The resonant frequency of the cantilever was affected not only by the film's elasticity but also by the substrate even at an indentation depth of about 0.6nm. The substrate effect was removed by employing a theoretical formula on the indentation of a layered half-space, together with a hard disk without DLC coating. The moduli of the 6-nm-thick and 10-nm-thick DLC films were 392 GPa and 345 GPa, respectively. The error analysis showed the standard deviation less than 5% in the moduli.
社団法人日本機械学会の論文
2005-11-03