WS.4-8 ダイヤモンド MEMS

概要

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The excellent mechanical, electrical, thermal, and chemical properties of diamond make it a candidate material for microsensors and microstructures to be used in microelectromechanical systems (MEMS). This paper describes micromachining techniques for the fabrication of diamond MEMS devices. The techniques include the patterning of chemical-vapor-deposited (CVD) diamond thin film by selective deposition, surface micromachining technique for the fabrication of movable microstructures, a silicon mold technique for the fabrication of three-dimensional microstructures, and a bonding technique for assembly. In addition, the application of micromachining techniques to the construction of some chosen diamond MEMS devices is also illustrated; these include a diamond microgripper driven by an electrostatic comb actuator, a semiconductive diamond tip for a scanning tunneling microscope (STM) as well as a machining tool, and a diamond probe for an atomic force microscope (AFM).
一般社団法人日本機械学会の論文
2002-03-14