ArFエキシマレーザによる高分子材料のアブレーション特性に関する基礎的研究

概要

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Polymer ablation by a UV laser irradiation was experimentally investigated to understand the influence of irradiation parameters on the change of polymer. Polyethylene terephthalate sheets of 350μm in thickness were irradiated at 10 Hz with the 193 nm ArF excimer laser pulses of a full width at half maximum of 26 nsec. The polyethylene terephthalate has an extremely high absorption coefficient, 2.3×10^7l/m, at 193 nm. The number of delivered pulses, fluence, and irradiation angle were changed and, particularly, attention was given to the influence of irradiation angle, which has not been yet systematically investigated so far. The ablation mass and depth as macroscopic characteristics were measured. The morphological microstructure of the surface after irradiation was observed with a scanning electron microscope and an optical microscope as well, and the characteristic length of the microstructure was quantitatively made clear.
一般社団法人日本機械学会の論文
1998-12-25