紫外線感光性樹脂を使ったマイクロストラクチュアの製造 : 第1報, 樹脂鋳型の精度の検討

概要

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This research work deals with the development of a simple and practical manufacturing technique for metallic micro structural parts in the order of 0.01-1mm in size. In this technique, an ultra-violet laser beam is irradiated into a liquid photopolymer material through a mask. The irradiated pattern is then developed to obtain the solid mold. The metallic part is then made by electroforming process. This paper deals with the first process that is making a photopolymer mold. At first the accuracy of the mold is estimated by applying diffraction and absorption theories of light. Next the accuracy is examined experimentally. The results show an accuracy of ±1μm can be obtained when the distance between mask and photopolymer layer is 10μm. By using the stacking of thin films, precise mold with deep straight Walls are made.
一般社団法人日本機械学会の論文
1991-10-25