紫外線感光性樹脂を使ったマイクロストラクチュアの製造 : 第3報,集束ビーム描画法における硬化特性

概要

論文の詳細を見る
This work deals with the development of a manufacturing technique for micromechanical parts. The micromechanical parts or micromolds are made by writing with a focused UV laser beam on the surface of a liquid photopolymer layer. The irradiated liquid polymer is then developed to produce a solidified micromechanical part or micromold. This paper theoretically examines the effect of physical parameters such as wavelength of the laser beam, focal length of the lens and writing speed on the shapes of the solidified polymer. The optimum conditions for high-aspect-ratio (height/width) micromechanical parts are also examined. Using a focused beam, high-aspect-ratio polymer structures are formed.
一般社団法人日本機械学会の論文
1995-01-25