紫外線感光性樹脂を使ったマイクロストラクチュアの製造 : 第2報, 描画法におけるビーム形状と硬化特性

概要

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This work deals with the development of a manufacturing technique for high-aspect-ratio (height/width) micromechanical parts. The micromechanical parts or micromolds are made by writing with a UV laser beam on the surface of a liquid photopolymer layer. The author examine the shapes of the solidified polymer that can be obtained by writing using several shapes of beams along typical contours. The examination is done both theoretically and experimentally. The results show that a beam with a uniform intensity has a higher resolution than a gaussian beam in obtaining a determined solidified width and vertical sidewall along the thickness of the polymer layer. By using a beam with uniform intensity, high-aspect-ratio polymer microstructures are made.
一般社団法人日本機械学会の論文
1994-07-25