紫外線感光性樹脂を使ったマイクロストラクチュアの製造 : 第4報, 集束ビーム描画法による三次元部品の製作

概要

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This work concerns the development of a manufacturing technique for three-dimensional micromechanical parts. The micromechanical parts or micromolds are made by writing with a focused UV laser beam on the surface of a liquid photopolymer. At this time the irradiated portion of the liquid photopolymer becomes solid. Three- dimensional solidified polymer structures are then obtained by stacking the two- dimensional polymer structures. In this paper we theoretically examine the effect of absorption of light in a photopolylmer and exposure factors such as beam power and writing speed on the shape of the solidified polymer. The optimum conditions for three-dimensional micromechanical parts are also determined. Using these conditions, three-dimensional micropolymer structures are formed. The shapes obtained by stacking two-dimensional polymer structures are also examined.
一般社団法人日本機械学会の論文
1996-02-25