四塩化珪素の気相酸素(酸化)分解による微粒子シリカの生成

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The synthesis of finely-divided silica from silicon tetrachloride and oxygen by the vapor phase reaction was investigated at 1200°C, with an emphasis on the effects of reaction conditions on the particle size distribution of the products. The results were as follows:1) The reaction between silicon tetrachloride and oxygen starts at about 800°C, then takes place rapidly at 1000°C, and reaches to the 100% conversion above 1100°C (Fig. 3).2) The products were amorphous and nearly spherical particles with the diameter of 150 to 1000Å (Fig. 6). The size distribution became narrower and the mean particle size did smaller with the decreasing in the oxygen concentration or the increasing in the silicon tetrachloride concentration (Figs. 7 and 8). Such effects of gas composition on the particle size distribution were qualitatively explained in terms of the relative change between the nucleation and growth rates with the compositions.3) The surface area of products was measured about five times as large by BET method as electron microscopic method (Table 2). This means that the particle produced has pores or an uneven surface.4) The reaction rate of SiCl4-O2 system at 925°C was proportional to the partial pressure of silicon tetrachloride, whereas with oxygen pressure it increases rapidly at the low pressure and then did gradually above 0.06 atm. (Fig. 10). The partial pressure dependency of nucleation and growth rates was discussed briefly.
社団法人日本セラミックス協会の論文
1973-05-01

四塩化珪素の気相酸素(酸化)分解による微粒子シリカの生成

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