湿潤Ar雰囲気におけるSi_3N_4焼結体の高温酸化(<小特集>セラミック材料小特集号)

概要

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Oxidation behavior of sintered Si_3N_4. incorporated with Y_2O_3 and Al_2O_3 as sintering aids was studied at 1400℃ for 15 h in wet argon flow containing 0.6, 3.5, 12.2 or 38.1 vol% H_2O. The oxidation reaction was followed every minute by the measurement of the evolved H_2 and N_2 using a quadrupole mass spectrometer. In every oxidation experiment, the N_2 and H_2 evolution rates took maxima at the onset of reaction and then gradually decreased with time, although very sharp peaks indicative of the explosion of bubbles in the oxide layer were observed in the cases of high water vapor contents. Oxidation kinetics bore a linear-parabolic relationship except for the case of 3.5 vol% H_2O. In case of 0.6 vol% H_2O, the weight gain was very low while the amounts of the evolved H_2 and N_2 were very large, suggesting the concurrent active oxidation accompanied with the weight loss.
社団法人日本材料学会の論文
1992-05-15